TSMC has 50% of the world's EUV machines

https://www.anandtech.com/show/16042/tsmc-we-have-50-of-all-euv-installations-60-wafer-capacity

"ASML has sold a total of about 140 EUV systems in the past decade, each one now costing up to $200 million, according to Wennink."

https://www.google.com/search?q=number+of+euv+machine+in+the+world&rlz=1C5CHFA_enHK1009HK1009&ei=0yYjY-evNpWG0gThj46wCg&ved=0ahUKEwin5dr58Zb6AhUVg5QKHeGHA6YQ4dUDCA4&uact=5&oq=number+of+euv+machine+in+the+world&gs_lcp=Cgdnd3Mtd2l6EAMyBQgAEKIEMgUIABCiBDIFCAAQogQyBQgAEKIEOgoIABBHENYEELADOgUIIRCgAToHCCEQoAEQCkoECEEYAEoFCEASATFKBAhGGABQtgVY1BFg1RRoAXAAeACAAYMBiAGkB5IBAzQuNZgBAKABAcgBBcABAQ&sclient=gws-wiz