Shanghai-based firms have achieved mass production of semiconductors with 14-nm process and made breakthroughs in 90-nm lithography machines, ...

From SCMP:

According to Wu, the city has realised mass production of 14-nanometre chips, in an apparent reference to SMIC, and is able to make deep ultraviolet (DUV) lithography systems for 90-nm chips, in a reference to SMEE.

The problem is, until recently, ASML was allowed to sell DUV lithography machine to China, to curb home grown DUV lithography machine growth. Won't be surprised if ASML DUV machine is more capable, reliable, so China bought as many ASML machine as it can while the choice is still available. Then US realized China is capable of manufacturing sub 28 nm chips from 14, 10 down to 7 nm using DUV, and now banned ASML from selling DUV machines. But China has already achieved breakthrough in DUV machines. So this means ASML DUV lithography machine will simply give way to domestic DUV machine.

EUV is most likely in RD, just haven't reach commercial application. Until EUV is available, Chinese companies will have to use workaround.