motif
10/12/2020, 17:54:24
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the EUV lithographic machine, not that they will not use EUV. They currently only have DUV machine. TSMC also started their 7 nm process using DUV machine, starting with N7 process to produce low performance 7 nm chip, then N7P to produce high performance 7 nm chip, on DUV, but is now switching to EUV with N7+. So currently SMIC N+1, N+2 are on the same evolution path using DUV, and later on with EUV if they can get it. Looks like US is blocking them to get EUV machine, so I wonder what's their future plan. But for now, they'll be able to reach high performance 7 nm chip using N+2 process with DUV.
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