7 nm only TSMC and Global Foundries have started with DUV before transiting to EUV. Intel and Samsung started directly with EUV. Chinese companies such as SMIC have no choice except to use DUV. But no foundries have ever made 5 nm with DUV, all used EUV. Which means Chinese 5 nm process, which RD is already underway, will likely also require EUV.With the completion of Shanghai's industry cluster for the 14-nm chips, more advanced projects in the 7- and 5-nm processes will be accelerated, Chen said.
It's well known China do not have EUV due to blockade, so it can only come from domestic lithograhic machine.
